Film thickness controller
Technical features:
1. Full touch screen operation, simple and easy to use;
2.32A membrane system, each membrane system50/100Automatic coating of layers;
3. 12Road signal input/12Road switch output;
4. Provide fully automatic, semi-automatic, and manual control modes;
5.controllable2One source, one set of work, another set of pre dissolution;
Technical Parameter
|
CY-FDC-S controller |
crystal frequency |
6MHz (optional 2.5M 3M 5M 9M crystal) |
Display mode |
5 "color touchscreen+digital display speed and thickness |
operating mode |
Touch screen |
Final thickness |
00μ0000Å-99μ9999Å |
Thickness display resolution |
1Å/s |
Rate display resolution |
0.1Å/s |
Coating layers |
32 membrane systems, with 50/100 layers per membrane system; |
Number of probes |
A B |
Tool factor |
0.01-99.99 |
Time display |
00:00:00-23:59:59 H:M:S |
POWER DISPLAY |
0~99.9% |
Pre melting power |
0~99% |
Pre plating power |
0~99.9% |
Pre melting time/pre plating time |
0~99:99 m:s |
Pre melting insulation time /Pre plating insulation time |
0~99:99 m:s |
Coating rate (set rate) |
0~999.9Å/s |
Material storage |
257+10 customizable options |
Communication |
RS232/RS485 |
Controllable evaporation source |
Two, one set can work and the other set can be pre dissolved |
output control |
±10V/5V/2.5V |
I/Interface |
12 signal inputs/12 switch outputs |
Controllable number of crucibles |
1-16 pieces |
Coating display |
Rate curve/numerical value |
Number of coating cycles |
Automatic 50/100 layers per membrane system |
Chassis size |
480 × 280 × 89mm (2U 19 "chassis) |
Special Features:
1Manual, semi-automatic, automatic3Multiple coating modes to meet various coating machine configurations;
2Manual stop of coating: The coating process is manually terminated during the coating process;
3Manual control: Determine the initial coating process requirements;
4Interrupted film system: If problems or malfunctions are found during automatic and semi-automatic coating, the coating can be stopped and the current state can be automatically saved. After the malfunction occurs, the interrupted film system can continue coating;
5During automatic or semi-automatic coating, if the crystal oscillator fails, you can choose to terminate the coating, apply the coating according to the current power time, or switch the chip to continue (multi chip probe);
6Simultaneous pre melting of two sources: During the process of coating the current layer, it is possible to choose to simultaneously melt the second layer2Pre melting of layers to meet tight time requirements;
7Password protection: The membrane system and membrane layer parameters have password protection function, which protects the process parameters from being modified by non process personnel;
8Coating data recording: During automatic or semi-automatic coating, the system can record the film-forming time and final thickness rate parameters of each layer of film.